周期性梯度富硅SiN x薄膜的微结构与发光特性
陈小波1,2, 杨雯1, 段良飞1, 张力元1, 杨培志1

Microstructure and Luminous Property of Periodical Gradient Si-rich SiN x Thin Films
CHEN Xiao-Bo1,2, YANG Wen1, DUAN Liang-Fei1, ZHANG Li-Yuan1, YANG Pei-Zhi1
图 5 单层薄膜a和梯度薄膜b的横截面TEM照片硅量子点的晶体结构用红色圆圈标注
Fig. 5 Cross-sectional TEM images of single-layer film a and gradient-layer film b. The crystalline structure of Si qu-an-tum dots is circled by red circles